@article{92861,
  author = {Hyun and Hae-Jeong Lee and Eric Lin and Alamgir Karim and Daniel Hines and Do Yoon and Christopher Soles},
  title = {Nanoimprint Lithography for the Direct Patterning of Nanoporous Interlayer Dielectric Insulator Materials},
  year = {2008},
  number = {6921},
  month = {2008-03-28},
  publisher = {SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852733},
  language = {en},
}