@conference{91126,
  author = {Ulf Griesmann and Tony Schmitz and Johannes Soons},
  title = {New Optical Metrology at NIST for Semiconductor Lithography},
  year = {2002},
  month = {2002-04-17},
  publisher = {ASPE Conference - Progress in Precision, Raleigh, NC},
  language = {en},
}