@article{860456,
  author = {Grant Myers and Siddharth Hazra and Maarten de Boer and Chris Michaels and Stephan Stranick and Ryan Koseski and Robert Cook and Frank DelRio},
  title = {Stress mapping of micromachined polycrystalline silicon devices via confocal Raman microscopy},
  year = {2014},
  number = {104},
  month = {2014-06-15 00:06:00},
  publisher = {Applied Physics Letters},
  doi = {https://doi.org/10.1063/1.4878616},
  language = {en},
}