@article{842651, author = {D. Hill and Robert Bartynski and Nhan Nguyen and Albert Davydov and Deane Chandler-Horowitz and Martin Frank}, title = {The relationship between local order, long range order, and sub-bandgap defects in hafnium oxide and hafnium silicate films}, year = {2008}, month = {2008-05-09 00:05:00}, publisher = {Journal of Applied Physics}, language = {en}, }