@conference{842531, author = {Bin Li and Li Shi and Paul Ho and JiPing Zhou and Richard Allen and Michael Cresswell}, title = {Test Structures for Study of Electron Transport in Nickel Silicide Features with Linewidths between 40 nm and 100 nm}, year = {2006}, month = {2006-04-01 00:04:00}, publisher = {IEEE ICMTS International Conference on Microelectronic Test Structures, Austin, TX, USA}, language = {en}, }