@article{842231,
  author = {Stewart Smith and Andreas Tsiamis and Martin McCallum and Andrew Hourd and J Stevenson and Anthony Walton and Ronald Dixson and Richard Allen and James Potzick and Michael Cresswell and Ndubuisi Orji},
  title = {Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks},
  year = {2009},
  number = {22},
  month = {2009-02-19 00:02:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901862},
  language = {en},
}