@article{841301,
  author = {O Wells and M Mcglashen-powell and Andras Vladar and Michael Postek},
  title = {Application of the Low-Loss Scanning Electron Microscope Image to Integrated Circuit Technology Part II - Chemically-Mechanically Planarized Samples},
  year = {2001},
  number = {23(6)},
  month = {2001-11-01 00:11:00},
  publisher = {Scanning},
  language = {en},
}