@conference{841016,
  author = {Ravikiran Attota and Richard Silver and Michael Stocker and Egon Marx and Jay Jun and M Davidson and Robert Larrabee},
  title = {New Method to Enhance Overlay Tool Performance},
  year = {2003},
  number = {5038},
  month = {2003-05-01 00:05:00},
  publisher = {Proceedings of SPIE on Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor May 2003, Santa Clara, CA, USA},
  language = {en},
}