@conference{840816, author = {E Amatucci and Nicholas Dagalakis and John Kramar and Fredric Scire}, title = {Performance Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage}, year = {2000}, number = {22}, month = {2000-01-01 00:01:00}, publisher = {Proceedings of American Society for Precision Engineering, Scottsdale, AZ, USA}, language = {en}, }