@article{840706, author = {K Doytchinov and F Kornblit and C Castellanos and J Oliveira and Thomas Renegar and Theodore Vorburger}, title = {International Comparison of Surface Roughness and Step Height (Depth) Standards, SIM 4.8}, year = {2006}, number = {43}, month = {2006-01-01 00:01:00}, publisher = {Metrologia}, language = {en}, }