@conference{840696,
  author = {B Bunday and M Bishop and John Villarrubia and Andras Vladar},
  title = {CD-SEM Measurement of Line-Edge Roughness Test Patterns for 193-nm Lithography},
  year = {2003},
  number = {5041},
  month = {2003-07-01 00:07:00},
  publisher = {Process and Materials Characterization and Dignostics in IC Manufacturing, Conference | | Process and Materials Characterization and Diagnostics in IC Manufacturing | | | SPIE, Undefined},
  language = {en},
}