@conference{840326,
  author = {R Koning and Ronald Dixson and Joseph Fu and V Tsai},
  title = {Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope},
  year = {1998},
  number = {No. 34},
  month = {1998-11-01 00:11:00},
  publisher = {Quantitative Microscopy, Seminar | 3rd |, Lyngby, 1, DE},
  language = {en},
}