@conference{840251,
  author = {A Deleporte and J Allgair and C Archie and G Banke and Michael Postek and J Schlesinger and Andras Vladar and A Yanof},
  title = {Benchmarking of Advanced CD-SEMs Against the New Unified Specification for Sub-0.18 Micrometer Lithography},
  year = {2000},
  number = {3998},
  month = {2000-06-02 00:06:00},
  publisher = {Proceedings of SPIE, Santa Clara, CA, USA},
  language = {en},
}