@article{839886,
  author = {F Chien and W Hsieh and S Gwo and Andras Vladar and John Dagata},
  title = {Silicon Nanostructures Fabricated by Scanning Probe Lithography and TMAH Etching},
  year = {2002},
  number = {91 No. 1044},
  month = {2002-01-01 00:01:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}