@article{839106,
  author = {M Sahiner and Joseph Woicik and P Gao and P McKeown and Mark Croft and M Gartman and B Benapfl},
  title = {Pulsed Laser Deposition and Characterization of Hf Based High-k Dielectric Thin Films},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Thin Solid Films},
  language = {en},
}