@article{835536,
  author = {Jennifer Klamo and Peter Schenck and Peter Burke and Kao-Shuo Chang and Martin Green},
  title = {Manipulation of crystallinity boundary via process space investigations of pulsed laser deposited high-k HfO2-TiO2-Y2O3 combinatorial thin films},
  year = {2010},
  number = {107},
  month = {2010-03-10 00:03:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}