@conference{8346,
  author = {Michael Postek and Andras Vladar and Petr Cizmar},
  title = {Nanomanufacturing Concerns about Measurements made in the SEM Part III: Vibration and Drift},
  year = {2014},
  month = {2014-12-01},
  publisher = {SPIE/Optics and Photonics Nanomanufacturing 2014, San Diego, CA},
  language = {en},
}