@article{833856,
  author = {M.A. Perez and John Kitching and A Shkel},
  title = {Design and Demonstration of PECVD Angled Multilayer Dielectric Mirrors Optimized for Micromachined Cavity Sidewalls},
  year = {2008},
  number = {155},
  month = {2008-10-25 00:10:00},
  publisher = {Sensors and Actuators A-Physical},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842528},
  language = {en},
}