@conference{831476,
  author = {Roy Geiss and David Read and Glenn Alers and Rebekah Graham},
  title = {EBSD Analysis of Narrow Damascene Copper Lines},
  year = {2009},
  number = {1173},
  month = {2009-05-11 00:05:00},
  publisher = {Proceedings of Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY, US},
  doi = {https://doi.org/10.1063/1.3251212},
  language = {en},
}