@conference{830491,
  author = {Richard Silver and Bryan Barnes and Nien Zhang and Hui Zhou and Andras Vladar and John Villarrubia and Regis Kline and Daniel Sunday and Alok Vaid},
  title = {Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model},
  year = {2014},
  number = {9050},
  month = {2014-04-14 00:04:00},
  publisher = {Proceedings of the SPIE, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915846},
  doi = {https://doi.org/10.1117/12.2048225},
  language = {en},
}