@inbook{829996,
  author = {Victor Vartanian and Richard Allen and Klaus Humler and Steve Olsen and Brian Sapp and Larry Smith},
  title = {Metrology Needs for 2.5D/3D Interconnect},
  year = {2014},
  number = {3},
  month = {2014-06-20 00:06:00},
  publisher = {Handbook of 3D Integration: Volume 3, Wiley, Malden, MA},
  doi = {https://doi.org/10.1002/9783527670109.ch29},
  language = {en},
}