@article{827526,
  author = {Weilnboeck Florian and Nirav Kumar and Gottlieb Oehrlein and Ting-Ying Chung and D Graves and Mingqi Li and Eric Hudson and Eric Benck},
  title = {Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions},
  year = {2012},
  number = {30},
  month = {2012-05-23 00:05:00},
  publisher = {Journal of Vacuum Science and Technology B},
  doi = {https://doi.org/10.1116/1.3697752},
  language = {en},
}