@inbook{825676, author = {J Murday and Robert Celotta and D Pui and P West}, title = {Investigative Tools: Experimental Methods and Probes}, year = {1999}, month = {1999-01-01 00:01:00}, publisher = {Nanotechnology Research Directions: The Interagency Working Group on Nanoscience, Engineering and Technology Report, National Science and Technology Council (NSTC)/Committee on Technology (CT), , Washington, DC}, language = {en}, }