@article{822731,
  author = {Yong Zhou and Y Shen and Z Zhang and Benjamin Tsai and D DeWitt},
  title = {Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing},
  year = {2000},
  month = {2000-09-20 00:09:00},
  publisher = {International Conference on Advanced Thermal Processing of Semiconductors},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850456},
  language = {en},
}