@conference{816311, author = {Nikolai Klimov and Thomas Purdy and Zeeshan Ahmed}, title = {Fabrication and Characterization of On-Chip Integrated Silicon Photonic Bragg Grating and Photonic Crystal Cavity Thermometers}, year = {2015}, month = {2015-06-30 00:06:00}, publisher = {2015 TechConnect World Innovation Conference , Washington , DC, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918438}, language = {en}, }