@conference{812836,
  author = {B Am ende and Michael Cresswell and Richard Allen and T Headley and William Guthrie and Loren Linholm and E. Bogardus and Christine Murabito},
  title = {Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis},
  year = {2002},
  number = {15},
  month = {2002-04-01 00:04:00},
  publisher = {Proc., 2002 ICMTS, Cork, US},
  language = {en},
}