@article{807031, author = {Haijun Liu and Douglas Olson and Miao Yu}, title = {Modeling of an air-backed diaphragm in dynamic pressure sensors: effects of the air cavity}, year = {2014}, number = {333}, month = {2014-10-07 00:10:00}, publisher = {Journal of the Acoustical Society of America}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914786}, doi = {https://doi.org/10.1016/j.jsv.2014.07.004}, language = {en}, }