@conference{803431,
  author = {Joel Seligson and B Golovanevsky and J Poplawski and M Adel and Richard Silver},
  title = {Overlay Metrology Simulations: Analytical and Experimental Validations},
  year = {2003},
  number = {5038},
  month = {2003-05-01 00:05:00},
  publisher = {Proceedings of SPIE on Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, May 2003, Santa Clara, CA, USA},
  language = {en},
}