@conference{803351,
  author = {S Gonda and Hui Zhou and Joseph Fu and Richard Silver},
  title = {A New Design and Uncertainty Budget for a Metrology UHV-STM Used in Direct Measurements of Atom Spacings},
  year = {2002},
  number = {4608},
  month = {2002-07-01 00:07:00},
  publisher = {Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD, USA},
  language = {en},
}