@conference{803316,
  author = {J Allgair and C Archie and W Banke and H Bogardus and J Griffith and H Marchman and Michael Postek and L Saraf and J Schlesinger and B Singh and N. Sullivan and L Trimble and Andras Vladar and A Yanof},
  title = {Toward a Unified Advanced CD-SEM Specification for Sub 0.18 Micrometer Technology},
  year = {1998},
  number = {3332},
  month = {1998-06-01 00:06:00},
  publisher = {Proceedings of SPIE, Santa Clara, CA, USA},
  language = {en},
}