@conference{803301,
  author = {M Sahiner and S Novak and Joseph Woicik and Y. Takamura and P Griffin and J Plummer},
  title = {The Local Structure of Antimony in High Dose Antimony Implants in Silicon by XAFS and SIMS},
  year = {2003},
  number = {717},
  month = {2003-01-01 00:01:00},
  publisher = {Si Front-End Junction Formation Technologies, Symposium C | | Silicon Front-End Junction Formation Technologies | Materials Research Society, Undefined},
  language = {en},
}