@article{801126,
  author = {Ryan Koseski and William Osborn and Stephan Stranick and Frank DelRio and Mark Vaudin and Thuy Dao and Vance Adams and Robert Cook},
  title = {Micro-scale measurement and modeling of stress in silicon surrounding a tungsten-filled through-silicon via},
  year = {2011},
  month = {2011-10-11 00:10:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908908},
  language = {en},
}