@article{798221, author = {Bharat Bhushan and H Liu and Stephen Hsu}, title = {Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects}, year = {2004}, number = {126}, month = {2004-07-01 00:07:00}, publisher = {Journal of Tribology-Transactions of the Asme}, language = {en}, }