@conference{796691,
  author = {K Morimoto and K Morita and K Ohnaka and John Dagata},
  title = {Lateral SiO<sub>x</sub> Tunnel Barrier Formation for Si-Based Tunnel Transistor Using Scanned Probe Oxidation},
  year = {2000},
  month = {2000-11-01 00:11:00},
  publisher = {Fourth International Workshop on Quantum Funtional Devices, Kanazawa, 1, JA},
  language = {en},
}