@conference{796201,
  author = {N. Sullivan and Ronald Dixson and B Bunday and M Mastovich and P Knutruda and P Fabre and R Brandoma},
  title = {Electron Beam Metrology of 193 nm Resists at Ultra Low Voltage},
  year = {2003},
  number = {5038},
  month = {2003-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA, USA},
  language = {en},
}