@conference{795996, author = {Huai Huang and Bin Li and Qiu Zhao and Zhiquan Luo and Jay Im and Min Kang and Richard Allen and Michael Cresswell and Rui Huang and Paul Ho}, title = {Nanoindentation of Si Nanostructures: Buckling and Friction at Nanoscales}, year = {2009}, month = {2009-09-18 00:09:00}, publisher = {10th international workshop on stress-Induced Phenomena in metallization, Austin, TX, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902683}, language = {en}, }