@conference{795556,
  author = {Nhan Nguyen and Jin-Ping Han and Yong Cho and Wenjuan Zhu and Zhijiong Luo and T Ma},
  title = {Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry},
  year = {2003},
  month = {2003-09-30 00:09:00},
  publisher = {Characterization and Metrology for ULSI Technology: 2003, Austin, TX, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31379},
  language = {en},
}