@conference{788451,
  author = {J Stover and Sven Schroeder and Thomas Germer},
  title = {Upper roughness limitations on the TIS/RMS relationship},
  year = {2012},
  number = {8495},
  month = {2012-09-27 00:09:00},
  publisher = {Reflection, Scattering, and Diffraction from Surfaces III, San Diego, CA, US},
  doi = {https://doi.org/10.1117/12.930770},
  language = {en},
}