@conference{787366,
  author = {Martin Foldyna and Thomas Germer and Brent Bergner},
  title = {Effects of Roughness on Scatterometry Signatures},
  year = {2011},
  number = {1395},
  month = {2011-05-26 00:05:00},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics 2011, Grenoble, FR},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908805},
  language = {en},
}