@conference{783826, author = {M Reitsma and Richard Gates}, title = {A New High Precision Procedure for AFM Probe Spring Constant Measurement Using a Microfabricated Calibrated Reference Cantilever Array (CRCA)}, year = {2006}, month = {2006-09-01 00:09:00}, publisher = {NSTI 2006 Nanotechnology Conference , Boston MA, 1}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854210}, language = {en}, }