@article{783686,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Ronald Jones and Eric Lin and Christopher Soles and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {A Combinatorial Methodology to Discovering the Material Factors Controlling Resist Line Edge Roughness, Shape, and Critical Dimension},
  year = {2002},
  number = {20},
  month = {2002-01-28 00:01:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852808},
  language = {en},
}