@conference{783496,
  author = {Shuhui Kang and Wen-Li Wu and B Vogt and Vivek Prabhu and Eric Lin and Karen Turnquest},
  title = {Evaluation of the 3D Compositional Fluctuation Effect on Line-Edge-Roughness},
  year = {2007},
  number = {6519},
  month = {2007-02-25 00:02:00},
  publisher = {Proceedings of SPIE, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852724},
  language = {en},
}