@conference{782896,
  author = {Marylyn Bennett and Angela Guerry and Ronald Dixson and Michael Postek and Theodore Vorburger},
  title = {Toward Traceability for At-line AFM Dimensional Metrology},
  year = {2003},
  number = {4689},
  month = {2003-07-01 00:07:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA, USA},
  language = {en},
}