@conference{782776,
  author = {Jon Pratt and David Newell and John Kramar and J Mulholland and Eric Whitenton},
  title = {Probe-Force Calibration Experiments Using the NIST Electrostatic Force Balance},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {2003 ASPE Winter Topical Meeting
Machines & Processes for Micro-scale & Meso-scale Fabrication, Metrology, & Assembly, Gainesville, FL, USA},
  language = {en},
}