@misc{779886,
  author = {Loucas Christophorou and James Olthoff},
  title = {Electron Interactions with Plasma Processing Gases},
  year = {1998},
  month = {1998-08-01 00:08:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16721},
  doi = {https://doi.org/10.6028/NIST.SP.926},
  language = {en},
}