@book{777946, author = {Loucas Christophorou and James Olthoff}, title = {Electron Collision Data for Plasma-Processing Gases}, year = {2000}, number = {88}, month = {2000-10-01 00:10:00}, publisher = {, }, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=7872}, language = {en}, }