@misc{777551,
  author = {Stephen Knight and Joaquin Martinez and Michele Buckley},
  title = {Office of Microelectronics Programs - Programs, Activities, and Accomplishments},
  year = {2005},
  month = {2005-01-01 00:01:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31836},
  doi = {https://doi.org/10.6028/NIST.ir.7171},
  language = {en},
}