@conference{7766,
  author = {Ann Chiaramonti and Sten Vollebregt and R. Ishihara and Johan van and Kees Beenakker},
  title = {Integrating carbon nanotubes as vias in a monolithic 3DIC process},
  year = {2013},
  month = {2013-03-21},
  publisher = {2012 International Conference on Solid State Devices and Materials, Kyoto, -1},
  language = {en},
}