@conference{775221,
  author = {Lowell Howard and Joseph Fu},
  title = {Accurate Force Measurements for Miniature Mechanical Systems: A Review of Progress},
  year = {1997},
  number = {3225},
  month = {1997-09-01 00:09:00},
  publisher = {Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX, USA},
  language = {en},
}