@conference{775191,
  author = {John Villarrubia and Andras Vladar and B Bunday and M Bishop},
  title = {Dimensional Metrology of Resist Lines Using a SEM Model-Based Library Approach},
  year = {2004},
  number = {5375},
  month = {2004-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822158},
  language = {en},
}